Impact of silicon nitride thickness on the infrared...

Sensors and Actuators A: Physical 2012 Vol. 185; Iss. none

Impact of silicon nitride thickness on the infrared sensitivity of silicon nitride–aluminum microcantilevers

Matthew R. Rosenberger, Beomjin Kwon, David G. Cahill, William P. King
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Volume:
185
Year:
2012
Language:
english
DOI:
10.1016/j.sna.2012.07.006
File:
PDF, 907 KB
english, 2012
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