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A high-performance multi-beam microaccelerometer for vibration monitoring in intelligent manufacturing equipment
Yan Liu, Yulong Zhao, Weizhong Wang, Lu Sun, Zhuangde JiangVolume:
189
Year:
2013
Language:
english
DOI:
10.1016/j.sna.2012.08.033
File:
PDF, 1.65 MB
english, 2013