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A very-low cross-axis sensitivity piezoresistive accelerometer with an electroplated gold layer atop a thickness reduced proof mass
A. Ravi Sankar, S. DasVolume:
189
Year:
2013
Language:
english
DOI:
10.1016/j.sna.2012.09.025
File:
PDF, 1.15 MB
english, 2013