Design and simulation of MEMS-based dual-axis fluidic...

Sensors and Actuators A: Physical 2013 Vol. 189; Iss. none

Design and simulation of MEMS-based dual-axis fluidic angular velocity sensor

Thien Xuan Dinh, Yoshifumi Ogami
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Volume:
189
Year:
2013
Language:
english
DOI:
10.1016/j.sna.2012.10.001
File:
PDF, 927 KB
english, 2013
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