A highly sensitive methane sensor with nickel alloy...

Solid-State Electronics 2012 / 10 Vol. 76

A highly sensitive methane sensor with nickel alloy microheater on micromachined Si substrate

Roy, S., Sarkar, C.K., Bhattacharyya, P.
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Volume:
76
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2012.05.040
Date:
October, 2012
File:
PDF, 607 KB
english, 2012
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