Characteristics and reliabilities on the Dicing before...

Solid-State Electronics 2013 / 1 Vol. 79

Characteristics and reliabilities on the Dicing before Grinding (DBG) process in nMOSFETs

Kao, Hsuan-Ling, Yeh, Chih-Sheng, Chen, Meng-Ting, Chiu, Hsien-Chin, Chang, Li-Chun
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Volume:
79
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2012.07.012
Date:
January, 2013
File:
PDF, 788 KB
english, 2013
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