Nanoscale CMOSFET performance improvement and reliability...

Solid-State Electronics 2013 / 1 Vol. 79

Nanoscale CMOSFET performance improvement and reliability study for local strain techniques

Huang, Hui Ling, Chen, Jem-Kun, Houng, Mau Phon
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Volume:
79
Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2012.08.002
Date:
January, 2013
File:
PDF, 989 KB
english, 2013
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