Piezoresistive properties and structure of hydrogen-free DLC films deposited by DC and pulsed-DC unbalanced magnetron sputtering
Š. Meškinis, A. Vasiliauskas, K. Šlapikas, R. Gudaitis, S. Tamulevičius, G. NiauraVolume:
211
Year:
2012
Language:
english
DOI:
10.1016/j.surfcoat.2011.10.004
File:
PDF, 439 KB
english, 2012