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Effect of the deposition gas pressure on the structure and mechanical stability of sputtered amorphous carbon nitride films
S. Peponas, M. Lejeune, S. Charvet, M. Guedda, M. BenlahsenVolume:
212
Year:
2012
Language:
english
DOI:
10.1016/j.surfcoat.2012.09.054
File:
PDF, 710 KB
english, 2012