Design and scale-up of chemical vapour deposition reactors for semiconductor processing
C.R. Kleijn, K.J. Kuijlaars, H.E.A. Van Den AkkerVolume:
51
Year:
1996
Language:
english
Pages:
10
DOI:
10.1016/0009-2509(96)00069-3
File:
PDF, 683 KB
english, 1996