Chemiluminescence during thermal chemical vapour deposition of SiO2 from silane-oxygen mixtures
Peter van de Weijer, Bauke H. Zwerver, Joseph L.G. SuijkerVolume:
153
Year:
1988
Language:
english
Pages:
6
DOI:
10.1016/0009-2614(88)80128-3
File:
PDF, 552 KB
english, 1988