Investigation on the Electrochemical-Mechanical Polishing...

Investigation on the Electrochemical-Mechanical Polishing of NiP Substrate of Hard Disk

Chu Xiangfeng, Bai Linshan, Chen Tongyun
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Volume:
40
Year:
2011
Language:
english
DOI:
10.1016/s1875-5372(12)60012-5
File:
PDF, 405 KB
english, 2011
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