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Optimization of white light interferometry on rough surfaces based on error analysis
Zehra Saraç, Reinhard Groß, Claus Richter, Bernhard Wiesner, Gerd HäuslerVolume:
115
Year:
2004
Language:
english
DOI:
10.1078/0030-4026-00369
File:
PDF, 324 KB
english, 2004