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VLSI reliability challenges: from device physics to wafer scale systems
Takeda, E., Ikuzaki, K., Katto, H., Ohji, Y., Hinode, K., Hamada, A., Sakuta, T., Funabiki, T., Sasaki, T.Volume:
81
Year:
1993
Language:
english
DOI:
10.1109/5.220898
File:
PDF, 2.29 MB
english, 1993