Silicon carbide MEMS for harsh environments

Mehregany, M., Zorman, C.A., Rajan, N., Chien Hung Wu

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

Year:

1998

Language:

english

DOI:

10.1109/5.704265

File:

PDF, 399 KB

english, 1998

Conversion to is in progress

Conversion to is failed