Alignable epitaxial liftoff of GaAs materials with selective deposition using polyimide diaphragms
Camperi-Ginestet, C., Hargis, M., Jokerst, N., Allen, M.Volume:
3
Year:
1991
Language:
english
DOI:
10.1109/68.118028
File:
PDF, 502 KB
english, 1991