Vertical electrical interconnection of compound semiconductor thin-film devices to underlying silicon circuitry
Camperi-Ginestet, C., Kim, Y.W., Jokerst, N.M., Allen, M.G., Brooke, M.A.Volume:
4
Year:
1992
Language:
english
DOI:
10.1109/68.157129
File:
PDF, 489 KB
english, 1992