Vertical optical communication through stacked silicon wafers using hybrid monolithic thin film InGaAsP emitters and detectors
Calhoun, K.H., Camperi-Ginestet, C.B., Jokerst, N.M.Volume:
5
Year:
1993
Language:
english
DOI:
10.1109/68.196022
File:
PDF, 456 KB
english, 1993