Vertical optical communication through stacked silicon...

Vertical optical communication through stacked silicon wafers using hybrid monolithic thin film InGaAsP emitters and detectors

Calhoun, K.H., Camperi-Ginestet, C.B., Jokerst, N.M.
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Volume:
5
Year:
1993
Language:
english
DOI:
10.1109/68.196022
File:
PDF, 456 KB
english, 1993
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