Fabrication of low-temperature PECVD channel waveguides with significantly improved loss in the 1.50-1.55-μm wavelength range
Bazylenko, M.V., Gross, M., Allen, P.M., Chu, P.L.Volume:
7
Year:
1995
Language:
english
DOI:
10.1109/68.393202
File:
PDF, 303 KB
english, 1995