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Implementation of a closed-loop growth scheme for AlAs-GaAs distributed Bragg reflector (DBR) structures using in situ pyrometric interferometry monitoring
Liu, X., Ranalli, E., Sato, D.L., Lee, H.P.Volume:
8
Year:
1996
Language:
english
DOI:
10.1109/68.481110
File:
PDF, 352 KB
english, 1996