A monolithically integrated double Michelson interferometer...

A monolithically integrated double Michelson interferometer for optical displacement measurement with direction determination

Hofstetter, D., Zappe, H.P., Dandliker, R.
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Volume:
8
Year:
1996
Language:
english
DOI:
10.1109/68.536658
File:
PDF, 383 KB
english, 1996
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