Mushroom microlenses: optimized microlenses by reflow of multiple layers of photoresist
Heremans, P., Genoe, J., Kujik, M., Vounckx, R., Borghs, G.Volume:
9
Year:
1997
Language:
english
DOI:
10.1109/68.623265
File:
PDF, 72 KB
english, 1997