![](/img/cover-not-exists.png)
Micromachining of high-contrast optical waveguides in [111] silicon wafers
Pandraud, G., Veldhuis, G., Berenschot, J.W., Nijdam, A.J., Hoekstra, H.J.W.M., Parriaux, O., Lambeck, P.V.Volume:
12
Year:
2000
Language:
english
DOI:
10.1109/68.826923
File:
PDF, 361 KB
english, 2000