Design of ion-implanted MOSFET's with very small physical...

IEEE Journal of Solid-State Circuits 1974 Vol. 9; Iss. 5

Design of ion-implanted MOSFET's with very small physical dimensions

Dennard, R.H., Gaensslen, F.H., Rideout, V.L., Bassous, E., LeBlanc, A.R.
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Volume:
9
Year:
1974
Language:
english
DOI:
10.1109/jssc.1974.1050511
File:
PDF, 1.57 MB
english, 1974
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