Sealed-Interface Local Oxidation Technology

John Chi-Hung Hui, Tzu-Yin Chiu, Wong, S.-W.S., Oldham, W.G.

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Volume:

Year:

1982

Language:

english

DOI:

10.1109/jssc.1982.1051714

File:

PDF, 1.44 MB

english, 1982

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