A substrate-plate trench-capacitor (SPT) memory cell for...

IEEE Journal of Solid-State Circuits 1986 Vol. 21; Iss. 5

A substrate-plate trench-capacitor (SPT) memory cell for dynamic RAM's

Lu, N.C., Cottrell, P.E., Craig, W.J., Dash, S., Critchlow, D.L., Mohler, R.L., Machesney, B.J., Ning, T.H., Noble, W.P., Parent, R.M., Scheuerlein, R.E., Sprogis, E.J., Terman, L.M.
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Volume:
21
Year:
1986
Language:
english
DOI:
10.1109/jssc.1986.1052587
File:
PDF, 1.54 MB
english, 1986
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