Large tilt angle electrostatic force actuated micro-mirror

IEEE Photonics Technology Letters 2002 Vol. 14; Iss. 11

Large tilt angle electrostatic force actuated micro-mirror

Tae-Sik Kim, Sang-Shin Lee, Youngjoo Yee, Jong-Uk Bu, Chil-Geun Park, Man-Hyo Ha
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Volume:
14
Year:
2002
Language:
english
DOI:
10.1109/lpt.2002.803913
File:
PDF, 229 KB
english, 2002
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