High aspect ratio micromirrors with large static rotation...

IEEE Photonics Technology Letters 2004 Vol. 16; Iss. 8

High aspect ratio micromirrors with large static rotation and piston actuation

V. Milanovic, Sunghoon Kwon, L.P. Lee
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Volume:
16
Year:
2004
Language:
english
DOI:
10.1109/lpt.2004.828351
File:
PDF, 496 KB
english, 2004
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