Fabrication of 1.55-μm Si-based resonant cavity enhanced...

IEEE Photonics Technology Letters 2004 Vol. 16; Iss. 8

Fabrication of 1.55-μm Si-based resonant cavity enhanced photodetectors using sol-gel bonding

R.W. Mao, C.B. Li, Y.H. Zuo, B.W. Cheng, X.G. Teng, L.P. Luo, J.Z. Yu, Q.M. Wang
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Volume:
16
Year:
2004
Language:
english
DOI:
10.1109/lpt.2004.831049
File:
PDF, 134 KB
english, 2004
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