Fabrication and characterization of high-quality uniform...

IEEE Photonics Technology Letters 2006 Vol. 18; Iss. 17

Fabrication and characterization of high-quality uniform and apodized Si/sub 3/N/sub 4/ waveguide gratings using laser interference lithography

Hopman, W.C.L., Dekker, R., Yudistira, D., Engbers, W.F.A., Hoekstra, H.J.W.M., de Ridder, R.M.
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Volume:
18
Year:
2006
Language:
english
DOI:
10.1109/lpt.2006.881226
File:
PDF, 729 KB
english, 2006
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