Impact of Lithographic Grid Irregularity Assessed on...

IEEE Photonics Technology Letters 2007 Vol. 19; Iss. 5

Impact of Lithographic Grid Irregularity Assessed on Photonic Crystal Device Selectivity

Lucio Martinelli, Henri Benisty, Olivier Drisse, Estelle Derouin, Frdric Pommereau, Odile Legouezigou, Guang-Hua Duan
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Volume:
19
Year:
2007
Language:
english
DOI:
10.1109/lpt.2007.891238
File:
PDF, 353 KB
english, 2007
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