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High-Quality Flat-Top Micromachining of Silica by a CW CO2 Laser
Ozcan, L.C., Treanton, V., Kashyap, R., Martinu, L.Volume:
19
Year:
2007
Language:
english
DOI:
10.1109/lpt.2007.893044
File:
PDF, 152 KB
english, 2007