Two-Wavelength Grating Interferometry for MEMS Sensors

Two-Wavelength Grating Interferometry for MEMS Sensors

Ferhanoglu, O., Toy, M.F., Urey, H.
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Volume:
19
Year:
2007
Language:
english
DOI:
10.1109/lpt.2007.908450
File:
PDF, 415 KB
english, 2007
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