Moisture-Induced Surface Corrosion in AZO Thin Films Formed...

Moisture-Induced Surface Corrosion in AZO Thin Films Formed by Atomic Layer Deposition

Dhakal, T.P., Hamasha, M.M., Nandur, A.S., Vanhart, D., Vasekar, P., Lu, S., Sharma, A., Westgate, C.R.

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Volume:

Year:

2012

Language:

english

DOI:

10.1109/tdmr.2012.2186574

File:

PDF, 1.18 MB

english, 2012

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