Characterization of tantalum oxide-ruthenium oxide hybrid...

Characterization of tantalum oxide-ruthenium oxide hybrid capacitors

Tzu-Yen Chang, Xu Wang, Evans, D.A., Roberson, S.L., Zheng, J.P.
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Volume:
51
Year:
2004
Language:
english
DOI:
10.1109/tie.2004.837900
File:
PDF, 359 KB
english, 2004
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