Dynamic Surface Profilometry and Resonant-Mode Detection for Microstructure Characterization Using Nonconventional Stroboscopic Interferometry
Liang-Chia Chen, Xuan-Loc Nguyen, Hsin-Sing Huang, Jin-Liang ChenVolume:
57
Year:
2010
Language:
english
DOI:
10.1109/tie.2009.2036645
File:
PDF, 822 KB
english, 2010