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Wide vacuum pressure range monitoring by pirani SAW sensor
Nicolay, P., Elmazria, O., Sarry, F., Bouvot, L., Kambara, H., Singh, K.J., Alnot, P.Volume:
57
Year:
2010
Language:
english
DOI:
10.1109/tuffc.2010.1465
File:
PDF, 796 KB
english, 2010