![](/img/cover-not-exists.png)
The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator
Xiaotun Qiu, Ziyu Wang, Jie Zhu, Oiler, J., Rui Tang, Cunjiang Yu, Hongyu YuVolume:
57
Year:
2010
Language:
english
DOI:
10.1109/tuffc.2010.1637
File:
PDF, 407 KB
english, 2010