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Deep-collapse operation of capacitive micromachined ultrasonic transducers
Olcum, S., Yamaner, F.Y., Bozkurt, A., Atalar, A.Volume:
58
Year:
2011
Language:
english
DOI:
10.1109/tuffc.2011.2104
File:
PDF, 1.02 MB
english, 2011