Use of fluorine-doped silicon oxide for temperature...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2012 Vol. 59; Iss. 1

Use of fluorine-doped silicon oxide for temperature compensation of radio frequency surface acoustic wave devices

Matsuda, S., Hara, M., Miura, M., Matsuda, T., Ueda, U.M., Satoh, Y., Hashimoto, K.
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Volume:
59
Year:
2012
Language:
english
DOI:
10.1109/tuffc.2012.2164
File:
PDF, 388 KB
english, 2012
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