An efficient ultra-high vacuum cryopump with a low consumption of helium
B.G. Lazarev, V.I. Makarov, A.A. San'kov, S.F. Grishin, V.A. KovalenkoVolume:
15
Year:
1975
Language:
english
Pages:
2
DOI:
10.1016/0011-2275(75)90104-6
File:
PDF, 185 KB
english, 1975