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The Conversion of Perhydropolysilazane into SiON Films Characterized by X-Ray Photoelectron Spectroscopy
Wang, Kaishi, Zheng, Xiaohao, Ohuchi, Fumio S., Bordia, Rajendra K., Riedel, R.Volume:
95
Language:
english
Journal:
Journal of the American Ceramic Society
DOI:
10.1111/jace.12045
Date:
December, 2012
File:
PDF, 272 KB
english, 2012