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On the formation of the crystalline phases and nanostructure of silicon carbonitride layers grown on gallium arsenide substrates
N. I. Fainer, V. I. Kosyakov, Yu. M. Rumyantsev, E. A. MaximovskiiVolume:
53
Language:
english
DOI:
10.1134/s0022476612040270
Date:
July, 2012
File:
PDF, 330 KB
english, 2012