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Composition and structure of silicon carbonitride layers grown on Si(100)/(Fe, N, Co) substrates
N. I. Fainer, V. I. Kosyakov, Yu. M. Rumyantsev, E. A. Maximovskii, S. A. Prokhorova, P. N. GevkoVolume:
53
Language:
english
DOI:
10.1134/s0022476612040282
Date:
July, 2012
File:
PDF, 750 KB
english, 2012