Simulation of micromotor based on SOI structure

Russian Microelectronics 2012 / 12 Vol. 41; Iss. 7

Simulation of micromotor based on SOI structure

Amelichev, V. V., Godovitsyn, I. V., Il’kov, A. V., Kostromin, A. Yu.
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Volume:
41
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/s1063739712070165
Date:
December, 2012
File:
PDF, 438 KB
english, 2012
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