Thermochemical nitridation of sapphire substrates of different crystallographic orientations
S. V. Nizhankovskiy, A. A. Krukhmalev, H. Sh.-ogly Kaltaev, N. S. Sidelnikova, A. T. Budnikov, V. F. Tkachenko, M. V. Dobrotvorskaya, E. A. Vovk, S. I. Krivonogov, G. T. AdonkinVolume:
54
Language:
english
DOI:
10.1134/s1063783412090211
Date:
September, 2012
File:
PDF, 263 KB
english, 2012