Studying the morphology of hemispherical-grain polycrystalline silicon films
A. V. Novak, Yu. V. Nikol’skii, S. N. FokichevVolume:
38
Language:
english
DOI:
10.1134/s1063785012080202
Date:
August, 2012
File:
PDF, 303 KB
english, 2012