Gaussian diffusion sphere model to predict deposition velocity onto wafers in laminar parallel airflow considering thermophoresis
Woo, Sang-Hee, Yook, Se-Jin, Han, Seog YoungVolume:
127
Language:
english
Journal:
The European Physical Journal Plus
DOI:
10.1140/epjp/i2012-12132-9
Date:
November, 2012
File:
PDF, 805 KB
english, 2012