A flexible nanobrush pad for the chemical mechanical planarization of Cu/ultra-low-к materials
Guiquan Han, Yuhong Liu, Xinchun Lu, Jianbin LuoVolume:
7
Language:
english
DOI:
10.1186/1556-276x-7-603
Date:
December, 2012
File:
PDF, 246 KB
english, 2012