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Discrete distribution of implanted and annealed arsenic atoms in silicon nanowires and its effect on device performance
Masashi Uematsu, Kohei M Itoh, Gennady Mil’nikov, Hideki Minari, Nobuya MoriVolume:
7
Language:
english
DOI:
10.1186/1556-276x-7-685
Date:
December, 2012
File:
PDF, 678 KB
english, 2012